Cart (Loading....) | Create Account
Close category search window
 

Piezoresistive Properties of Silicon Diffused Layers

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Tufte, O.N. ; Honeywell Research Center, Hopkins, Minnesota ; Stelzer, E.L.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1702605 

The piezoresistive properties of n‐ and p‐type layers formed by the diffusion of impurities into silicon have been investigated. The values of the three piezoresistance coefficients and the temperature dependence of the large coefficients have been measured on layers having surface concentration values from 1018 to 1021 cm-3. The piezoresistance effect in p‐type diffused layers follows qualitatively the behavior expected in a degenerate semiconductor. n‐type layers having high surface concentration values show a change in the symmetry of the piezoresistance effect at room temperature and a decrease in the coefficient π11 at lower temperatures. A discussion of the piezoresistance effect in diffused layers and its relation to the piezoresistance effect in uniformly doped material is also given.

Published in:

Journal of Applied Physics  (Volume:34 ,  Issue: 2 )

Date of Publication:

Feb 1963

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.