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The effects of structural and chemical defects on the low‐temperature (30–50°K) annealing peak in low‐temperature reactor‐irradiated aluminum and copper were studied. From the fact that the density of reactor‐induced defects did not affect the annealing kinetics, it was possible to conclude that the low‐temperature annealing process was of the first order without a unique activation energy. The fact fact that both oversized and undersized atoms could suppress this annealing peak led to the conclusion that the radiation‐induced defects were more complicated than simple point defects. The suggestion is made that a defect similar to a crowdion must be created by low‐temperature neutron irradiation. This data also supports to some degree the viewpoint that a radiation‐induced defect, possibly a crowdion, has sufficient knock‐on energy to migrate several hundred atomic distances. The experiments also contain evidence which rule out all forms of vacancy‐interstitial annihilation.