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Examination of high frequency dielectric properties of thin film polymers using an in-situ resonant technique

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5 Author(s)
Laursen, K.G. ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Hertling, D. ; Hodge, T.C. ; Bidstrup, S.A.
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Using an on-wafer resonant technique the high frequency dielectric properties of six thin film polymers are measured in the range from 1 GHz to 9 GHz. Comparisons are made between the high frequency and low frequency values of the dielectric constant. The effects of different cure conditions and metallizations are also examined

Published in:

Multi-Chip Module Conference, 1995. MCMC-95, Proceedings., 1995 IEEE

Date of Conference:

31 Jan-2 Feb 1995