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This paper proposes the high frequency high voltage power supply for an ozone generator using a phase-shift pulse width modulation (PWM) full bridge inverter. The circuit operation is fully described. The high frequency transformer and ozone generator mathematical models are also included for preliminarily calculating of instantaneous voltages and currents. The proposed system simulation using the MATLAB/SIMULINK software package is given. In order to ensure that zero voltage switching (ZVS) mode always operates over a certain range of a frequency variation, a series-compensated resonant inductor is included. The advantage of the proposed system is a capability of varying ozone gas production quantity by varying the frequency and phase shift angle of the converter whilst the applied voltage to the electrodes is kept constant. The correctness of the proposed technique is verified by both simulation and experimental results.