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Both solid‐ and liquid‐phase explosive crystallization occur in mono‐Si amorphized by implantation, in addition to solid‐phase epitaxy (SPE). As in deposited a‐Si, the two corresponding furnacelike crystallization regimes are observed when the dwell time is too short for a complete SPE.
Published in:
Journal of Applied Physics
(Volume:54
,
Issue:
1
)
Date of Publication: Jan 1983
- Page(s):
- 395 - 397
- ISSN :
- 0021-8979
- Digital Object Identifier :
- 10.1063/1.331716
- Date of Current Version :
- 06 July 2009
- Issue Date :
- Jan 1983
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