The authors report excellent microwave characteristics of C-doped base InP/InGaAs heterojunction bipolar transistors (HBTs) grown by metalorganic chemical vapour deposition (MOCVD). A combination of a low resistance base layer (2.5×1019 cm-3, 700 Å) and a very narrow emitter mesa structure (0.5×4.7 μm 2) enabled us to achieve a record maximum oscillation frequency (fmax) of 170 GHz at Jc=1.7×105 A/cm2 for C-doped base InP/InGaAs HBTs
Published in:
Electronics Letters
(Volume:32
,
Issue:
15
)
Date of Publication: 18 Jul 1996