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A 0.65 THz Focal-Plane Array in a Quarter-Micron CMOS Process Technology

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4 Author(s)
Ojefors, E. ; Inst. for High-Freq. & Commun. Technol., Univ. of Wuppertal, Wuppertal ; Pfeiffer, U.R. ; Lisauskas, A. ; Roskos, H.G.

A focal-plane array (FPA) for room-temperature detection of 0.65-THz radiation has been fully integrated in a low-cost 0.25 mum CMOS process technology. The circuit architecture is based on the principle of distributed resistive self-mixing and facilitates broadband direct detection well beyond the cutoff frequency of the technology. The 3 timesZ 5 pixel array consists of differential on-chip patch antennas, NMOS direct detectors, and integrated 43-dB voltage amplifiers. At 0.65 THz the FPA achieves a responsivity (Rv) of 80 kV/W and a noise equivalent power (NEP) of 300 pW/ radic{Hz}. Active multi-pixel imaging of postal envelopes demonstrates the FPAs potential for future cost-effective terahertz imaging solutions.

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Solid-State Circuits, IEEE Journal of  (Volume:44 ,  Issue: 7 )