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A 2-DOF Circular-Resonator-Driven In-Plane Vibratory Grating Laser Scanner

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6 Author(s)
Yu Du ; Nat. Univ. of Singapore, Singapore, Singapore ; Guangya Zhou ; Koon Lin Cheo ; Zhang, Qingxin
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In this paper, we present the design, modeling, fabrication, and measurement results of a microelectromechanical systems (MEMS)-based in-plane vibratory grating scanner driven by a two-degree-of-freedom (2-DOF) comb-driven circular resonator for high-speed laser scanning applications. Diffraction grating driven by a 2-DOF circular resonator has the potential to scan at large amplitudes compared with those driven by a one-degree-of-freedom (1-DOF) comb-driven circular resonator or a 2-DOF electrical comb-driven lateral-to-rotational resonator. We have demonstrated that our prototype device, with a 1-mm-diameter diffraction grating is capable of scanning at 20.289 kHz with an optical scan angle of around 25deg. A refined theoretical model with fewer assumptions is proposed, which can make the prediction of dynamic performance much more accurate.

Published in:

Microelectromechanical Systems, Journal of  (Volume:18 ,  Issue: 4 )

Date of Publication:

Aug. 2009

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