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Conditions for Image-Based Identification of SPM-Nanopositioner Dynamics

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2 Author(s)
Clayton, G.M. ; Dept. of Mech. Eng., Villanova Univ., Villanova, PA, USA ; Devasia, S.

Rather than using external sensors, images of standard calibration samples can be used to model and correct positioning errors caused by dynamics effects in scanning probe microscopes (SPMs). The main contribution of this study is the development of conditions, on the calibration sample and the scan trajectory, that allow for the image based identification of SPM nanopositioner dynamics. The choice of and tradeoff between calibration sample and scan trajectory properties are discussed in the context of a scanning tunneling microscope (STM) example.

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Mechatronics, IEEE/ASME Transactions on  (Volume:14 ,  Issue: 4 )