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Determinations of oxide thicknesses on tritided erbium films using beta‐induced x‐ray fluorescence

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2 Author(s)
Musket, R.G. ; Sandia Laboratories, Livermore, California 94550 ; Bauer, W.

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For a tritided erbium film, tritium‐decay betas induce characteristic x‐ray emission from the film, the Er2O3 oxide layer, and the substrate. Measurement of the beta‐induced x‐ray spectrum for x rays with energies between ∼0.3 and 8 keV using a windowless Si(Li) detector permitted evaluation of the O(Kα)/Er(Lα) intensity ratio. This ratio was correlated with the total oxygen surface density as determined using proton‐induced x rays from the same films, and the results have beeen compared to a theoretical model by Haggmark. A strong dependence of the O(Kα)/Er(Lα) ratio on Er2O3 areal density has been demonstrated for oxide thicknesses less than ∼300 Å.

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Journal of Applied Physics  (Volume:47 ,  Issue: 1 )