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Nucleation of voids and their growth during electromigration

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2 Author(s)
Suhl, H. ; Bell Laboratories, Murray Hill, New Jersey 07974 ; Turner, P.A.

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The growth and distribution of voids formed by vacancy agglomeration during electromigration is examined. It is demonstrated for the first time that a critical current density must be exceeded for void production.

Published in:

Journal of Applied Physics  (Volume:44 ,  Issue: 11 )