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Mass Spectrometric Study of Sputtering of KB by Low‐Energy Ar+ and Xe+ Ions

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2 Author(s)
Campbell, Arthur B. ; Physics Department, University of Delaware, Newark, Delaware 19711 ; Cooper, C.Burleigh

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A KBr target was bombarded normally with Ar+ and Xe+ ions, with energies ranging from 25 to 180 eV, in the source of a mass spectrometer capable of detecting neutral and negative sputtered species. A relatively strong signal of Br- ions sputtered from the target was detected, and relative sputtering yield curves were obtained. The yield was greater for Ar+ than for Xe+ ion bombardment at all ion energies. No neutral K0 or Br0 atoms, nor KBr0 molecules, were detected as having been sputtered from the target during bombardment.

Published in:

Journal of Applied Physics  (Volume:43 ,  Issue: 3 )