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A Micropower Front End for Three-Axis Capacitive Microaccelerometers

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6 Author(s)
Kamarainen, M. ; Electron. Circuit Design Lab., Helsinki Univ. of Technol., Espoo, Finland ; Saukoski, M. ; Paavola, M. ; Jarvinen, J.A.M.
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This paper presents the measurement results of a micropower switched-capacitor front end that was designed for three-axis capacitive microaccelerometers. The designed front end can reduce the distorting effects of the electrostatic forces and can be used in single-ended and differential modes. The front end was realized with a 0.13-mum bipolar complimentary metal-oxide-semiconductor process. The silicon area of the front end is 0.30 mm2. The measurements show that the functionality of the front end follows the theory in both modes. Consuming 20 muA from a 1.8-V supply, it achieves noise densities of 424, 607, and 590 mug/radic(Hz) in the x-, y-, and z-directions, respectively, when each mass is sampled at 1 kHz in the differential mode.

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Instrumentation and Measurement, IEEE Transactions on  (Volume:58 ,  Issue: 10 )