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Foil specimens of austenitic stainless steel (type 304 stainless steel) were irradiated with 50– 400 keV Ar, Kr, and Xe ions in the fluence range of 1×1020–1×1021 ions/m2 at room temperature. It has been shown by glancing angle x‐ray diffraction (GXRD) measurement that the amount of ion‐induced phase transformation of γ →α’ in the foil specimens depends strongly on irradiation conditions such as ion species, energy, and fluence; the amount of the phase transformation at saturation increases linearly with increasing ion range. An ion‐induced new peak was found in the GXRD pattern, which is shown to be due to solidification of implanted rare‐gas atoms in the stainless steel. The solid phase inclusions of the rare‐gas atoms have a close correlation with the phase transformation. It is shown that the phase transformation is induced by the formation of highly pressurized rare‐gas inclusions, while the formation of the inclusions depends on a depth distribution of implanted rare‐gas atoms.