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Microstructural control of diamond thin films by microlithographic patterning

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3 Author(s)
DeNatale, J.F. ; Rockwell International Science Center, Thousand Oaks, California 91360 ; Flintoff, J.F. ; Harker, A.B.

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Microlithographic patterning has been used to elucidate the mechanisms controlling diamond film nucleation and grain growth. The approach is capable of establishing a degree of control over diamond nucleation on the substrate, which can be used to improve film uniformity and enhance fine grained microstructure. The observed microstructures in the patterned films are consistent with an intrinsic growth mechanism based upon defect‐initiated renucleation.

Published in:

Journal of Applied Physics  (Volume:68 ,  Issue: 8 )

Date of Publication:

Oct 1990

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