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The effect of anodization on the electromigration drift velocity in aluminum films

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4 Author(s)
Ross, C.A. ; University of Cambridge, Department of Materials Science and Metallurgy, Pembroke Street, Cambridge CB2 3QZ, United Kingdom ; Drewery, J.S. ; Somekh, R.E. ; Evetts, J.E.

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The electromigration drift velocity has been measured, using the Blech–Kinsbron [Thin Solid Films 25, 327 (1975)] edge displacement method, for aluminum thin films under different thicknesses of anodization. The drift velocity is found to decrease with increasing anodization thickness. The results are interpreted in terms of a change in the self‐diffusivity of aluminum as a result of the compressive stresses imposed by the anodized layer. The effect of the variation of diffusivity with stress on the stress distribution within a drifting thin‐film sample is discussed.

Published in:

Journal of Applied Physics  (Volume:66 ,  Issue: 6 )

Date of Publication:

Sep 1989

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