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Theoretical analysis of the electrode sheath in rf discharges

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1 Author(s)
Riemann, K.‐U. ; Institut für Theoretische Physik, Ruhr‐Universität, D‐4630 Bochum 1, Federal Republic of Germany

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Starting from a previous kinetic theory of the plasma boundary layer (charge exchange model of the presheath), we investigate a collisionless planar electrode sheath of a capacitively coupled rf discharge in the frequency range between the ionic and electronic plasma frequencies (ωp+≪ω≪ωp-). The resulting model equations are evaluated in an approximation based on thick‐sheath assumptions. We calculate the current‐voltage characteristics of the sheath and analyze the voltage distribution in a two‐electrode system.

Published in:

Journal of Applied Physics  (Volume:65 ,  Issue: 3 )

Date of Publication:

Feb 1989

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