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Reexamination of recent experimental results in surface‐wave‐produced argon plasmas at 2.45 GHz: Comparison with the diffusion‐recombination model results

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4 Author(s)
Sola, A. ; Departamento de Física Aplicada, Universidad de Córdoba, 14071 Cordoba, Spain ; Gamero, A. ; Cotrino, J. ; Colomer, V.

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In this paper we comment on recently reported experimental data about some characteristic magnitudes of plasma columns produced and maintained by surface microwaves. We then compare them with theoretical values obtained from the diffusion‐recombination model of Mateev, Zhelyazkov, and Atanassov [J. Appl. Phys. 54, 3049 (1988)] and Zhelyazkov, Benova, and Atanassov [J. Appl. Phys. 59, 1466 (1986)] for the same magnitudes, in a wide range of operating conditions. Such a comparison allows us to make conclusions about the results of the model and its hypothesis.

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Journal of Applied Physics  (Volume:64 ,  Issue: 7 )