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Variable angle of incidence spectroscopic ellipsometric characterization of TiO2/Ag/TiO2 optical coatings

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3 Author(s)
Memarzadeh, Kazem ; Department of Electrical Engineering, University of Nebraska‐Lincoln, Lincoln, Nebraska 68588‐0511 ; Woollam, John A. ; Belkind, Abe

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Optical constants (3000–8000 Å) and layer thicknesses of TiO2/Ag/TiO2 optical coatings are determined using variable angle of incidence spectroscopic ellipsometry. Ellipsometrically determined silver layer thicknesses agree well with those obtained by cross‐sectional transmission electron microscopy. Also, spectral characteristics, absent in bulk silver data, are observed in n and k spectra for the thin silver layers. It is suggested that these structures may be caused by plasmon effects from the silver layers.

Published in:

Journal of Applied Physics  (Volume:64 ,  Issue: 7 )

Date of Publication:

Oct 1988

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