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Atomic force profiling by utilizing contact forces

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3 Author(s)
Yang, R. ; Physics Department, University of Missouri–Kansas City, Kansas City, Missouri 64110 ; Miller, R. ; Bryant, P.J.

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Atomic force microscopy (AFM) is a new technology currently being developed. Stylus profilometry (SP) was developed earlier. A procedure is reported here which combines features of both SP and AFM. In this approach a stylus scans a sample surface and responds to contact forces. Force values are maintained within the elastic range of the sample, and high resolution is achieved by means of a sensitive tunnel gap feedback circuit control. Initial tests of performance have been conducted over a range of applied loads with tungsten styluses on phlogopite mica samples to image lamellar steps with subnanometer resolution.

Published in:

Journal of Applied Physics  (Volume:63 ,  Issue: 2 )