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Elimination of residual image distortion in the stigmatic ion microscope

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3 Author(s)
Bernius, Mark T. ; Baker Laboratory of Chemistry, Cornell University, Ithaca, New York 14853 ; Ling, Yong‐Chien ; Morrison, George H.

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A combination electrostatic octupole stigmator and cosine deflector has been incorporated into the secondary ion‐optical lattice of the stigmatic ion microscope. Distortion‐free images are obtained with a ∼15% improved image resolution and a ∼10% increased secondary ion signal measured at the detector, the latter improvement being beneficial also for depth‐profile (ion microprobe) work. The details outlined in this paper, which are easy to implement, are offered to users of the CAMECA IMS‐3f secondary ion mass spectrometer for a significant improvement in its imaging capability.

Published in:

Journal of Applied Physics  (Volume:61 ,  Issue: 5 )