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Deposition of new piezoelectric Ta2O5 thin films and their surface acoustic‐wave properties

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3 Author(s)
Nakagawa, Y. ; Faculty of Engineering, Yamanashi University, Takeda‐4, Kofu 400, Japan ; Gomi, Yasuo ; Okada, Takashi

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A new technique for the deposition of the crystallized Ta2O5 thin films is described. Crystallized Ta2O5 thin films have been deposited on fused quartz substrates by reactive dc‐diode sputtering. Crystalline structure and piezoelectric properties of the Ta2O5 thin film were investigated. Surface acoustic‐wave properties, including a phase velocity, coupling coefficient, temperature coefficient of delay, and propagation loss, were measured.

Published in:

Journal of Applied Physics  (Volume:61 ,  Issue: 11 )