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Large‐signal time‐domain modeling of low‐pressure rf glow discharges

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3 Author(s)
Barnes, Michael S. ; Department of Electrical Engineering and Computer Science, Solid‐State Electronics Laboratory, The University of Michigan, Ann Arbor, Michigan 48109 ; Cotler, Tina J. ; Elta, Michael E.

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Large‐signal time‐domain modeling (simulation) of rf glow discharges is a very useful and potentially accurate tool for the study of low‐pressure (50–500‐mT) gaseous electronics at high frequencies. Unfortunately, the computational limitations imposed for stability, accuracy, and efficiency can often hinder the production of useful, cost‐effective results. This paper describes a self‐consistent argon rf glow‐discharge simulation at 13.56 MHz for equal‐ and unequal‐area parallel‐plate electrode geometries. Some of the numerical problems associated with this type of simulation are identified and the numerical methods used to overcome them are described. To illustrate the usefulness of this modeling scheme, the plasma potential and the cathode dc bias are examined as functions of electrode area ratio and rf power.

Published in:

Journal of Applied Physics  (Volume:61 ,  Issue: 1 )