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Development and Fabrication of Cylindrical Silicon-on-Insulator Microdosimeter Arrays

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6 Author(s)
Nai Shyan Lai ; Sch. of Electr. Eng. & Telecommun., Univ. of New South Wales, Sydney, NSW ; Wee Han Lim ; Amy L. Ziebell ; Mark I. Reinhard
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Recent developments in the fabrication and simulation of prototype silicon-on-insulator (SOI) microdosimeter arrays are presented. A new planar array design has been proposed which has a number of advantages over the previous elongated parallelepiped and cylindrical mesa array designs. This novel planar array design, which incorporates a guard ring, is based upon 2500 planar cylindrically shaped p-i-n detectors and was fabricated via dopant diffusion and ion implantation. The dopant-diffused arrays were successfully fabricated and tested using 2 mum and 10-mum- thick SOI substrates. Technology computer-aided design modeling of the ion-implanted structure is presented which includes the electrostatic potential profile, showing possible avalanche signal multiplication around the n+ core of the microdosimeter. The alpha particle charge transient response was simulated to determine the charge collection in the sensitive region.

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IEEE Transactions on Nuclear Science  (Volume:56 ,  Issue: 3 )