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Nanograin crystalline transformation enhanced UV transparency of annealing refined indium tin oxide film

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5 Author(s)
Hsu, Wei-Lun ; Department of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, National Taiwan University, No. 1, Roosevelt Road, Sec. 4, Taipei 10617, Taiwan ; Yi-Hao Pai ; Fan-Shuen Meng ; Chee-Wee Liu
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This work investigates enhancing UV transmittance and resistivity of indium tin oxide (ITO) film via nanograin crystalline transformation. After annealing, the ITO transforms its crystallinity from amorphous to columnar nanograins, and enriches the Sn–O bonds with absorption at 572 cm-1 to greatly reduce its resistivity to 1.2×10-4 Ω cm. Long-term annealing beyond 475 °C transforms ITO crystallinity to equiaxed nanograins, promoting high UV transmittance of 50%–76% at 325–405 nm but increasing resistivity up to 1.6×10-3 Ω cm. A compromised UV transmittance of ≫50% and resistivity of ≪2×10-4 Ω cm can be simultaneously achieved in annealed ITO with hybrid crystallinity of columnar and equiaxed grains.

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Applied Physics Letters  (Volume:94 ,  Issue: 23 )