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Phase Feedback for Nonlinear MEM Resonators in Oscillator Circuits

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3 Author(s)
Mestrom, R.M.C. ; Dept. of Mech. Eng., Eindhoven Univ. of Technol., Eindhoven, Netherlands ; Fey, R.H.B. ; Nijmeijer, H.

In this paper, a phase feedback approach for using nonlinear microelectromechanical (MEM) resonators in oscillator circuits is investigated. Phase feedback makes use of the oscillation phase condition for oscillator circuits and enables fine-tuning of the frequency at which the resonator oscillates by means of setting the phase in the feedback amplifier. The principle of the approach is illustrated for a nonlinear Duffing resonator, which is representative of many types of MEM resonators. Next, the approach is applied to an electrostatically actuated nonlinear clamped-clamped beam MEM resonator, on simulation level. Phase feedback allows for operation of the resonator in its nonlinear regime. The closed-loop technique enables control of both the frequency of oscillation and the output power of the signal. Additionally, optimal operation points for oscillator circuits incorporating a nonlinear resonator can be defined. Application of phase feedback results in more robustness with respect to dynamic pull in than in open-loop case, however, at the cost of a deteriorated phase noise response.

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Mechatronics, IEEE/ASME Transactions on  (Volume:14 ,  Issue: 4 )