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Development of a Transformable Plasma Device for Materials Processing

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2 Author(s)
Ken Ogata ; Dept. of Adv. Mater. Sci., Univ. of Tokyo, Kashiwa ; Kazuo Terashima

In this paper, we have developed transformable-sheet electrodes for a capacitively coupled microwave plasma (CCMP) and diagnosed parameters of the CCMP in air, such as the rotational temperature of N2 (400-600 K at 80-230 torr) and the electron density (approximately 1013/cm3 at 300 torr). We applied the CCMP to surface modification of polycarbonate to improve the hydrophilic property of the surface. We also performed generation of a homogeneous plasma, which could be of various shapes, developing different transformable-sheet electrodes in air by ac (1.6 kV) at 10 kHz at 3 torr. These results suggested that on-demand plasma processing without an operating gas could be achieved by utilizing transformable-sheet electrode technology.

Published in:

IEEE Transactions on Plasma Science  (Volume:37 ,  Issue: 7 )