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Overview and analysis of readout circuits for capacitive sensing in MEMS gyroscopes (MEMS angular velocity sensors)

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2 Author(s)
Lobur, M. ; Dept. of CAD, Lviv Polytech. Nat. Univ., Lviv ; Holovatyy, A.

In the article, overview and analysis of the performance of capacitive sensing circuits for MEMS gyroscopes are presented. Their performance, advantages and disadvantages are given. The low-noise chopper stabilized readout circuit for capacitive measurements in MEMS gyroscopes is proposed.

Published in:

Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on

Date of Conference:

22-24 April 2009