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Diamond Microfluidic Devices have been manufactured with the transfer moulding (so-called replica) method. Standard photolitography, SiO2/Al masking layers and high aspect ratio plasma etching (Bosch process) were used to form vertical walls of deep shapes in silicon. Then, a thick polycrystalline diamond layer was deposited (MPCVD) on the surface of the pre-shaped silicon mould, silicon was etched-off and a diamond microfluidic device with deep microchannels was obtained.
Date of Conference: 22-24 April 2009