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Diamond Microfluidic Devices manufactured with the replica method

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7 Author(s)
Karczemska, A. ; Inst. of Turbomachinery, Tech. Univ. of Lodz, Lodz ; Witkowski, D. ; Ralchenko, V. ; Bolshakov, A.
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Diamond Microfluidic Devices have been manufactured with the transfer moulding (so-called replica) method. Standard photolitography, SiO2/Al masking layers and high aspect ratio plasma etching (Bosch process) were used to form vertical walls of deep shapes in silicon. Then, a thick polycrystalline diamond layer was deposited (MPCVD) on the surface of the pre-shaped silicon mould, silicon was etched-off and a diamond microfluidic device with deep microchannels was obtained.

Published in:

Perspective Technologies and Methods in MEMS Design, 2009. MEMSTECH 2009. 2009 5th International Conference on

Date of Conference:

22-24 April 2009

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