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Free-standing AlGaAs thermopiles for improved infrared sensor design

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2 Author(s)
Dehe, Alfons ; Inst. fur Hochfrequenztech., Tech. Hochschule Darmstadt, Germany ; Hartnagel, Hans L.

Our group introduced the GaAs/AlGaAs material system for various integrated and micromachined thermoelectric sensors. Investigating the material parameters of AlxGa1-xAs in detail indicates that this material system can be optimized with respect to thermoelectric properties. We demonstrate that figures of merit Z as high as 1.4×10-4 K-1 are predicted. Simultaneously, this material is compatible for micro-machining purposes. The presented infrared sensor is optimized with respect to the material parameter and design. The sensors do not need a supporting membrane and hence undesirable parallel thermal conductance is reduced. Sensors of different geometrical dimensions have been fabricated and compared. Black body measurements result in responsivities up to R=365 V/W and maximum relative detectivities of D*=6.9×108 cm√(Hz)/W which compare to the predicted performance

Published in:

Electron Devices, IEEE Transactions on  (Volume:43 ,  Issue: 8 )

Date of Publication:

Aug 1996

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