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The background effect in electron stimulated desorption ion angular distribution (ESDIAD) measurements due to soft x‐ray production on Si(111)‐(7×7) is investigated. We find that the background intensity from a Si(111)‐(7×7) surface varies linearly with incident electron beam energy and current density. It is also found that the elimination of the background effect (by subtraction) plays a crucial role in both quantitative and qualitative interpretations of digital ESDIAD measurements on silicon, as well as to similar measurements on other surfaces.
Published in:
Review of Scientific Instruments
(Volume:62
,
Issue:
3
)
Date of Publication: Mar 1991
- Page(s):
- 720 - 724
- ISSN :
- 0034-6748
- Digital Object Identifier :
- 10.1063/1.1142074
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 18 June 2009
- Issue Date :
- Mar 1991
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