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Functional design of a pulsed two-frequency capacitively coupled plasma in CF4/Ar for SiO2 etching

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4 Author(s)
Maeshige, Kazunobu ; Department of Electronics and Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223-8522, Japan ; Washio, Gentaro ; Yagisawa, Takashi ; Makabe, Toshiaki

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A capacitively coupled plasma (CCP) with a different frequency source at each of two parallel plates is a powerful tool for SiO2 etching. A time modulation of two-frequency CCP by a pulsed-power operation will be one of the practical solutions in the next generation of etchers, and will allow charging-free plasma processes for high-aspect-ratio holes or trench etching. We numerically predict the structure and functions of a pulsed two-frequency CCP in CF4(5%)/Ar, and discuss its ability to generate charge-free plasma processes. We also investigate the functional separation between plasma production by very high frequency (100 MHz) and bias voltage application by low frequency (1 MHz). Alternate injections of high-energy positive and negative ions are predicted during the off-phase of a pulsed two-frequency CCP. © 2002 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:91 ,  Issue: 12 )