Growth of garnet thin films for magneto-optic memories by pyrosol CVD process

A description is given of the deposition of garnet thin films for magnetooptic memories. The deposition technique (pyrosol process) is based on the pyrolysis of an ultrasonic generated aerosol, which contains the dissolved organometallic precursors. Films have been deposited at temperatures ranging from 520 degrees to 600 degrees C. Y/sub 3/Fe/sub 5/O/sub 12/ polycrystalline thin films with good crystallinity were obtained on glass or fused quartz substrates after annealing the deposited films. Single-crystal thin films were grown by epitaxy on GGG single-crystal wafers as shown by grazing X-ray diffraction and Kikuchi experiments. Magnetic and magnetooptic properties of the films were very close to the bulk material properties.<
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