Cart (Loading....) | Create Account
Close category search window

Calculation of the electrode shape for suppression of the standing wave effect in large area rectangular capacitively coupled reactors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Sansonnens, L. ; Centre de Recherches en Physique des Plasmas, Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland

Your organization might have access to this article on the publisher's site. To check, click on this link: 

The electromagnetic standing wave becomes one of the main sources of plasma nonuniformity in large area capacitively coupled rf reactors. In cylindrical reactors with a central rf connection or one-dimensional linear reactors with rf connections at both extremities, Gaussian shaped electrodes can be used to suppress this standing wave. In this work, we present a two-dimensional quasiplanar circuit model and a numerical method for calculation of the electrode shape that can suppress the standing wave effect in large area rectangular reactors. It is shown that the calculated shapes are not Gaussian, and are not only a function of the reactor dimensions and excitation frequency, but are also strongly influenced by the position and number of rf connections, as will also be the case for a cylindrical reactor with a noncentral rf connection. However, when a shape has been determined for a given reactor geometry and rf excitation frequency, then it is shown that it remains independent of the plasma provided that the electromagnetic skin depth in the plasma remains large enough such that skin effects remain negligible.

Published in:

Journal of Applied Physics  (Volume:97 ,  Issue: 6 )

Date of Publication:

Mar 2005

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.