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Low-impedance internal linear inductive antenna for large-area flat panel display plasma processing

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6 Author(s)
Kim, K.N. ; Department of Materials Science and Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, 440-746, S. Korea ; Jung, S.J. ; Lee, Y.J. ; Yeom, G.Y.
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An internal-type linear inductive antenna, that is, a double-comb-type antenna, was developed for a large-area plasma source having the size of 1020 mm×830 mm, and high density plasmas on the order of 2.3×1011 cm-3 were obtained with 15 mTorr Ar at 5000 W of inductive power with good plasma stability. This is higher than that for the conventional serpentine-type antenna, possibly due to the low impedance, resulting in high efficiency of power transfer for the double-comb antenna type. In addition, due to the remarkable reduction of the antenna length, a plasma uniformity of less than 8% was obtained within the substrate area of 880 mm×660 mm at 5000 W without having a standing-wave effect.

Published in:

Journal of Applied Physics  (Volume:97 ,  Issue: 6 )