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Measurement of metastable He*(23S1) density in dielectric barrier discharges with two different configurations operating at around atmospheric pressure

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3 Author(s)
Tachibana, K. ; Department of Electronic Science and Engineering, Kyoto University, Kyoto-Daigaku Katsura, Nishikyo-ku, Kyoto 615-8510, Japan ; Kishimoto, Y. ; Sakai, O.

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We have measured the density of metastable He atoms in the lowest triplet state (23S1) with a diode-laser absorption spectroscopic technique in atmospheric pressure plasmas produced by dielectric barrier discharge schemes. Two different types of electrode configuration are employed: one is a conventional parallel-plate system and the other is a microdischarge integrated system with stacked metal-mesh electrodes covered by insulating films. We have analyzed the pressure-broadened spectral line corresponding to the 23S1→23PJ (J=0–2) transition to derive the broadening coefficient and to calibrate absolute densities. The measured density ranges from 1011 to 1012 cm-3, but the values in the mesh-type system are larger than those in the parallel-plate system by about one order of magnitude. The density, however, depends strongly on the gas flow rate, showing the influence of quenching by the Penning-ionization process with impurities. Those behaviors are consistent with the variation of the electron density estimated by millimeter-wave transmittance measurement.

Published in:

Journal of Applied Physics  (Volume:97 ,  Issue: 12 )

Date of Publication:

Jun 2005

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