The equilibrium crystal shape (ECS) of GaAs homoepitaxially grown on a nanoscale SiO2-patterned (001) plane by molecular beam epitaxy is investigated. A GaAs epilayer selectively grown on a nanoscale area bounded by a circular SiO2 mask undergoes faceting, resulting in a pyramidal shape with {110} sidewalls. Growth is slowed or terminated with the generation of these {110} facets even with a continuing supply of Ga atoms. This implies that the pyramidal shape is energetically very stable. Based on experimental results and the Wulff construction, a {110}-type sidewall pyramid is proposed as an ECS of GaAs on (001) in nanoscale patterned growth. © 2004 American Institute of Physics.
Published in:
Journal of Applied Physics
(Volume:96
,
Issue:
2
)
Date of Publication:
Jul 2004
- Page(s):
-
1214
-
1218
- ISSN :
-
0021-8979
- Digital Object Identifier :
-
10.1063/1.1757657
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Jul 2004