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Indentation of a square elastomeric thin film by a flat-ended cylindrical punch in the presence of long-range intersurface forces

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3 Author(s)
Ju, Bing-Feng ; Department of Mechanical Engineering, Tohoku University, Aoba 01, Aramaki, Aoba-ku, Sendai 980-8579, Japan ; Wan, Kai-tak ; Kuo-Kang Liu

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This paper reports an experimental study of the elastic deformation of a 200 μm thick microfabricated square membrane with sides ranging from 8.5 mm to 15 mm as indented by a fine cylindrical, flat-ended punch with diameter 500 μm in the presence of long-range intersurface forces. An apparatus was constructed to allow simultaneously measurements of the indenter displacement and the applied force. A number of interesting phenomena such as the “jump-into-contact” and the “pull-off” between the membrane and the moving cylinder were observed. A simple theoretical analysis using linear elasticity was adopted to fit the load-displacement curve (compliance) and thus estimated the Young’s modulus of the membrane. The measured parameters are consistent with data reported in literature.

Published in:

Journal of Applied Physics  (Volume:96 ,  Issue: 11 )