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Investigation of incubation in ArF excimer laser irradiated poly(methyl-methacrylate) using pulsed force mode atomic force microscopy

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7 Author(s)
Hopp, B. ; Research Group on Laser Physics of the Hungarian Academy of Sciences, University of Szeged, H-6720 Szeged, Dóm tér 9, Hungary ; Smausz, T. ; Kokavecz, J. ; Kresz, N.
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An atomic force microscopic method to study the incubation states of UV laser irradiated polymer samples is presented. Targets were illuminated by different number of pulses at 5.8 and 8.9 mJ/cm2 fluences. The induced adhesive and morphological changes were investigated simultaneously by an atomic force microscope equipped with a pulsed force mode extension. Importantly, below 100 pulses morphological changes were not observable while significant changes in the adhesion were found as a result of the incubation at 8.9 mJ/cm2 fluence. This method allows the imaging and detection of the whole laser modified area with nanometer resolution.

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Journal of Applied Physics  (Volume:96 ,  Issue: 10 )