Cart (Loading....) | Create Account
Close category search window
 

Electron cyclotron resonance deposition, structure, and properties of oxygen incorporated hydrogenated diamondlike amorphous carbon films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Adamopoulos, G. ; Laboratoire de Physique des Interfaces et des Couches Minces, Unité Mixte de Recherche 7647 Centre National de la Recherche Scientifique, Ecole Polytechnique, 91128 Palaiseau Cedex, France ; Godet, C. ; Zorba, T. ; Paraskevopoulos, K.M.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1804624 

Oxygen-incorporated hydrogenated amorphous carbon films were grown by the integrated distributed electron cyclotron resonance plasma technique from a mixture of acetylene and oxygen. It has been found that the increase of the oxygen to acetylene gas ratio results in more oxygen incorporation up to O/(O+C)=0.2 with a decrease in the hydrogen concentration within the film as measured by the nuclear reaction analysis (NRA) and a combination of the elastic recoil detection analysis and Rutherford backscattering techniques. The spectroscopic ellipsometry in the range of 1.5–5 eV showed a negligible decrease of the E04 optical band gap for increasing the oxygen content. At the same time, the decrease of the refractive index from 2.2 to 2.0 denotes the decrease of the films density, which was independently estimated by NRA. The visible (488 nm) Raman spectroscopy showed that the increase of the oxygen content favors the clustering of the six-fold sp2C rings. The Fourier transform infrared spectroscopy gives evidence of both C–O and CO bonding configurations. No evidence of O–H bonds formation is found. Simultaneously, the chemisorption of CO2 seems to increased with increasing the oxygen to acetylene gas ratio, which is consistent with the lower film density. The previously trends denote the “softening” of the films, which is consistent with the significant decrease (of about 35%) of the compressive stress allowing the growth of thicker but still transparent films.

Published in:

Journal of Applied Physics  (Volume:96 ,  Issue: 10 )

Date of Publication:

Nov 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.