High-mobility transparent conducting Mo-doped In₂O₃ thin films by pulsed laser deposition

Highly conductive and transparent Mo-doped indium oxide (IMO) thin films were grown on glass and (100) yttria-stabilized zirconia (YSZ) single-crystal substrates by pulsed laser deposition. The electrical, optical, and structural properties were measured for films grown from 0, 1, 2, and 4 wt % Mo-doped targets. Films grown from the 2 wt % Mo-doped target had the best overall properties. In particular, for biaxially textured 2 wt % Mo IMO films grown on (100) YSZ, the conductivity was ∼3000 S cm^-1 with a mobility greater than 95 cm² V^-1 s^-1. In the visible, the optical transmittance normalized to the substrate was greater than 90%. © 2004 American Institute of Physics.