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High-mobility transparent conducting Mo-doped In2O3 thin films by pulsed laser deposition

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9 Author(s)
Warmsingh, A.C. ; Colorado School of Mines, Golden, Colorado 80401 ; Yoshida, Y. ; Readey, D.W. ; Teplin, C.W.
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Highly conductive and transparent Mo-doped indium oxide (IMO) thin films were grown on glass and (100) yttria-stabilized zirconia (YSZ) single-crystal substrates by pulsed laser deposition. The electrical, optical, and structural properties were measured for films grown from 0, 1, 2, and 4 wt % Mo-doped targets. Films grown from the 2 wt % Mo-doped target had the best overall properties. In particular, for biaxially textured 2 wt % Mo IMO films grown on (100) YSZ, the conductivity was ∼3000 S cm-1 with a mobility greater than 95 cm2 V-1 s-1. In the visible, the optical transmittance normalized to the substrate was greater than 90%. © 2004 American Institute of Physics.

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Journal of Applied Physics  (Volume:95 ,  Issue: 7 )