Cart (Loading....) | Create Account
Close category search window
 

Characterization of a silicon-on-insulator based thin film resistor in electrolyte solutions for sensor applications

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Nikolaides, M.G. ; Lehrstuhl für Biophysik—E22, Technische Universität München ; Rauschenbach, S. ; Bausch, A.R.

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1650880 

We characterize the recently introduced silicon-on-insulator based thin film resistor in electrolyte solutions and demonstrate its use as a pH sensing device. The sensor’s response function can be tuned by a back gate potential, which is demonstrated by employing known changes of the pH of the solution. The highest sensitivity to pH changes is obtained when the charge carrier concentration at the back interface of the thin Si-film is low compared to the front interface. Calibration measurements with a reference electrode are used to relate the obtained resistance to the surface potential. Applying the site binding model to fit the measured data for variations of the pH gives excellent agreement. The sensors response can be related to a surface potential change of -50 mV/pH and from the obtained signal–to–noise ratio, the detection limit can be estimated to be 0.03 pH. For a (bio-)molecular use of the sensor element, a passivation of the silicon oxide surface against this pH response can be achieved by depositing an organic layer of poly- methyl-methacrylate (PMMA) onto the devices by spin coating. As expected, the pH response of the surface disappears after the deposition of PMMA. This passivation technique provides an easy and reliable way to obtain a biocompatible interface, which can be further functionalized for the detection of specific molecular recognition events. © 2004 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:95 ,  Issue: 7 )

Date of Publication:

Apr 2004

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.