Cart (Loading....) | Create Account
Close category search window

Comparison of the ablation plumes arising from ArF laser ablation of graphite, silicon, copper, and aluminum in vacuum

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Claeyssens, Frederik ; School of Chemistry, University of Bristol, Bristol, BS8 1TS, United Kingdom ; Henley, Simon J. ; Ashfold, Michael N.R.

Your organization might have access to this article on the publisher's site. To check, click on this link: 

The ablation plumes arising after irradiation of graphite, silicon, copper and aluminum with a pulsed nanosecond ArF (λ=193 nm) laser at fluences between 2 and 20 J cm-2 in vacuum are studied and compared. The neutral and ionic components in the ablation plume have been measured via quadrupole mass spectrometry and ion probes, respectively. Additional information about the degree of ionization and the velocities of singly and multiply charged ions in the plume have been deduced via optical emission spectrometry, and the electron velocity distributions have been measured with Langmuir probes. Probing the plasma properties with this range of techniques is shown to provide a rather detailed picture of the ablation characteristics. The velocity distributions of the neutral atoms are comparatively narrow (∼1 km s-1 full width at half maximum) and peaked at a center of mass velocity of ∼3–4 km s-1. Their general form is reminiscent of those of species expanding supersonically from a pulsed nozzle. The electron and ion velocity distributions are much broader, and centered at much higher velocities (and kinetic energies). The relative ion yield, and the overall degree of ionization, both increase with increasing fluence and scale inversely with the ionization potentials of the respective target materials. Both charged components are found to be accelerating at short distances from the target. Such effects have been rationalized by assuming that incident laser radiation ionizes (by multiphoton ionization) neutral species ablated from the target surface, and that these ions and electrons then act as “seeds” for subsequent plume heating, ionization and plasma formation by inverse bremsstrahlung. This a- bsorption due to inverse bremsstrahlung ensures the incident laser intensity is highest at the outer edge of the expanding plume. The outer region thus receives preferential excitation and heating—traditionally pictured in terms of the so-called two electron temperature model. Some of the resulting “hot” electrons escape from this coronal region, leading to an overall charge imbalance within the plasma, which manifests itself as an acceleration (driven by Coulombic interactions) of the charged components within the plume. © 2003 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:94 ,  Issue: 4 )

Date of Publication:

Aug 2003

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.