Cart (Loading....) | Create Account
Close category search window
 

Effects of grain boundary on impurity gettering and oxygen precipitation in polycrystalline sheet silicon

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Lu, Jinggang ; Materials Science and Engineering Department, North Carolina State University, Raleigh, North Carolina 27695-7916 ; Wagener, Magnus ; Rozgonyi, George ; Rand, James
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1578699 

The effects of grain boundaries (GB) in polycrystalline sheet silicon on impurity gettering and oxygen precipitation were investigated by electron beam induced current (EBIC), deep level transient spectroscopy (DLTS), micro-Fourier-transform infrared spectroscopy (FTIR), and preferential etching/Normaski optical microscopy techniques. Both as-grown and thermally processed wafers were studied. A correlation between GB density and transition metal concentration was quantitatively established by combining DLTS and EBIC studies. It was found that four deep levels arising from Fe–B, Fe–Al, Cr–B, and Fei were present in the as-grown sample, and their concentrations decrease with increasing GB density. GB gettering was further verified by the presence of an EBIC image contrast halo around the GB. Preferential etching also revealed a precipitate density of 2×107 cm-2 on the GB. After processing, a clearly defined oxygen precipitate denuded zone formed around the GB with the interstitial oxygen concentration [Oi] decreased from 14.4 to 2.2×1017 cm-3. Micro-FTIR showed that, for both processed and as-grown samples, more silicon oxynitride appears in the GB than in the intragrain region. Since nitrogen enhances oxygen precipitation, it is likely that nitrogen preferentially precipitated on the GB during the wafer formation process and resulted in a nitrogen depletion zone, where oxygen precipitation was further suppressed and a denuded zone formed. © 2003 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:94 ,  Issue: 1 )

Date of Publication:

Jul 2003

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.