By Topic

Two-dimensional self-consistent microwave argon plasma simulations with experimental verification

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Li, Y. ; Department of Mechanical Engineering, University of Arkansas, Fayetteville, Arkansas 72701 ; Gordon, M.H. ; Roe, L.A. ; Hassouni, K.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1577810 

Optical emission spectroscopy (OES), absorption measurements, and thermal energy rate analysis were used in tandem with numerical models to characterize microwave argon plasmas. A WAVEMAT (model MPDR-3135) microwave diamond deposition system was used to generate argon plasmas at 5 Torr. Three excited state number densities (4p, 5p, and 5d) were obtained from the OES measurements, and a fourth excited state number density (4s) was obtained from the absorption measurements. Further, power absorbed in the substrate was monitored. A self-consistent two-dimensional argon model coupled with an electromagnetic field model and a 25-level two-dimensional (2D)-collisional-radiative model (CRM) was developed and validated with the experimental measurements. The 2D model provides the gas and electron temperature distributions, and the electron, ion, and 4s state number densities, which are then iteratively fed into the electromagnetic and CRM models. Both the numerically predicted thermal energy rates and excited state densities agreed, within the experimental and numerical uncertainties, with the experimental results. © 2003 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:94 ,  Issue: 1 )