By Topic

Effects of presheath dynamics on radio-frequency sheaths

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
2 Author(s)
Xiang, N. ; Institute for Fusion Studies, University of Texas at Austin, Texas 78712 ; Waelbroeck, F.L.

Your organization might have access to this article on the publisher's site. To check, click on this link: 

A common approach to the study of radio frequency (rf) sheaths is to separate the description of the sheaths from that of the bulk plasma. In order to solve the resulting set of equations, an appropriate boundary condition for the sheath model has to be specified at the sheath–plasma boundary. In the existing sheath models, this boundary condition is assumed to be stationary. In present article, we investigate the ion dynamics in both presheath region and sheath region by using numerical as well as analytical methods. It is found that the presheath introduces an additional time scale ωpre=VB/ (here, l is the characteristic scale of the presheath and VB is the Bohm velocity). If the rf frequency ω is low enough so that ω≤ωpre, the boundary condition for the sheath depends on the ion dynamics in the presheath. In the very low-frequency regime ω≪VB/, an analytical expression for the ion current is obtained which agrees well with the numerical result. © 2003 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:93 ,  Issue: 9 )