Cart (Loading....) | Create Account
Close category search window

Particle-in-cell/Monte Carlo simulations of a low-pressure capacitively coupled radio-frequency discharge: Effect of adding H2 to an Ar discharge

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Neyts, E. ; University of Antwerp, Department of Chemistry, Universiteitsplein 1, B-2610 Antwerp, Belgium ; Yan, M. ; Bogaerts, A. ; Gijbels, R.

Your organization might have access to this article on the publisher's site. To check, click on this link: 

A one-dimensional particle-in-cell/Monte Carlo code with three velocity components is developed to simulate a capacitively coupled radio-frequency Ar/H2 discharge at low pressure, and to investigate the effect of adding hydrogen to an argon discharge. This self-consistent kinetic simulation technique allows one to study fundamental processes in the discharge at the molecular level. It is shown that the addition of small amounts of H2 to an Ar discharge has profound effects on the discharge behavior, i.e., a change in the electron energy probability function, an increase in the electron density at low H2 content and a decrease at higher H2 content, as well as a dip in the Ar+ ion density in the center of the discharge at higher pressure. These effects can be explained by the collision processes taking place in the discharge. The simulations were carried out in the pressure range 50–250 mTorr, at voltages of 300 and 800 V, while the H2 content was varied between 0% and 10%, at a constant driving frequency of 13.56 MHz. © 2003 American Institute of Physics.

Published in:

Journal of Applied Physics  (Volume:93 ,  Issue: 9 )

Date of Publication:

May 2003

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.