We have studied the structural and transport properties of Sb2Te3 thin films prepared by molecular beam epitaxy as a function of the Te/Sb flux ratio during deposition. Both the crystallinity and the transport properties are found to be strongly affected by nonstoichiometry. The most stoichiometric sample (prepared with a Te/Sb ratio of 3.6) had a high degree of crystallinity, high thermopower, and high carrier mobility. However, Sb2Te3 films with excess Sb or Te had poorer crystallinity, reduced magnitude of the thermopower, and reduced mobility as a result of the formation of antisite defects. These antisite defects were able to be reduced by controlling the relative flow rate ratio of Te to Sb during growth. © 2002 American Institute of Physics.
Published in:
Journal of Applied Physics
(Volume:91
,
Issue:
2
)
Date of Publication:
Jan 2002
- Page(s):
-
715
-
718
- ISSN :
-
0021-8979
- Digital Object Identifier :
-
10.1063/1.1424056
- Product Type:
-
Journals & Magazines
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Jan 2002