Spatial distributions of electron density (ne) and electron temperature (Te) of a micro-discharge plasma for an alternating current plasma display panel cell were directly measured using the laser Thomson scattering method. The use of a triple-grating spectrometer was very successful in suppressing the strong stray laser light and allowed us to perform measurements at 0.1 mm above the surface of the electrode substrate. Values of ne and Te were (0.2–3)×1019 m-3 and (1.6–3.4) eV, respectively, depending on the time from the beginning of the pulsed discharge and the observation position. The structure of the micro-discharge is discussed in terms of the obtained distributions of ne and Te. © 2002 American Institute of Physics.
Published in:
Journal of Applied Physics
(Volume:91
,
Issue:
2
)
Date of Publication:
Jan 2002
- Page(s):
-
613
-
616
- ISSN :
-
0021-8979
- Digital Object Identifier :
-
10.1063/1.1419264
- Product Type:
-
Journals & Magazines
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Jan 2002