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Browse Journals & Magazines > Journal of Applied Physics ...> Volume:91 Issue:1 Help

Monte Carlo simulation of ions inside a cylindrical bore for plasma source ion implantation

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2 Author(s)
Liu, Chengsen ; State Key Laboratory of Materials Modification by Laser, Electron, and Ion Beams, Department of Physics, Dalian University of Technology, Dalian 116023, People’s Republic of China ; Dezhen Wang

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.1421239 

The ion impact energy and angle distributions at the interior sidewall of a large cylindrical bore in the presence of an auxiliary electrode for plasma source ion implantation are determined. A collisional model is developed for cylindrical bore geometry by using Monte Carlo techniques. The ion-neutral charge exchange and momentum-transfer cross sections that depend on the ion energy are taken into account precisely. The simulation results for ions (Ar+) implanting into the target for different pressures are given and the relationship between the distributions and the pressure of the neutral gas is investigated. © 2002 American Institute of Physics.

Published in:
Journal of Applied Physics  (Volume:91 ,  Issue: 1 )

Date of Publication: Jan 2002

Page(s):
32 - 35
ISSN :
0021-8979
Digital Object Identifier :
10.1063/1.1421239
Product Type:
Journals & Magazines
Date of Current Version :
18 June 2009
Issue Date :
Jan 2002

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